英特格 化学品输送系统

对于最先进的制程和具有挑战性的化学品来说，英特格(Entegris)提供安全所需的容器，蒸发器和设备，并有效地将化学物质储存和输送至制程室。

• Solid Chemical Delivery Systems
  Solid chemical delivery systems providing a stable mass flux and a wide variety of solid materials used in current and future technology nodes.


• Liquid Chemical Delivery Systems
  We provide containers, vaporizers and equipment necessary to safety and effectively store and deliver chemistries to the process chamber for the most advanced processes and challenging chemistries.