英特格 气体扩散器

英特格(Entegris)气体扩散器与大多数真空系统的设计可以相容，且易于安装或改装至Load lock腔体，冷却腔体，传输腔体和制程腔体。可以在快速破真空至大气压力时，有效防止落尘掉入腔体中。

• Chambergard™ Gas Diffusers
  Chambergard™ fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput.