密封系统

几十年来，我们一直是提供Chemraz®全氟弹性体（FFKM）基本密封组件的值得信赖的供应商。 作为洁净室制造的先驱，我们不断地开发，具有更高的抗等离子性和减少颗粒化的新式弹性体化合物，进而提高生产率和清洁度为目标。 此外，Extensis®成型能力使得能够研发客制化的大型密封件，用于FPD（平板显示器）生产线中。 随着半导体行业的不断发展，我们的密封解决方案将与时俱进，并确保下一代技术得以实现。

设计

Dovetail® Seals

Extensis® Custom, Large-Scale Seals

KF Fitting Seals

Metal Spring Energized (MSE®)

材质

Chemraz (全氟橡胶FFKM)
513: Universal Compound
520: Withstands High Loads
543: Universal Compound
547: Exceptional Fluorine Plasma Resistance
550: Carbon-Loaded Compound
551: Chemical Resistance at High Temperatures
570: Very Low Contaminants
571: Durable in Wet Applications
592: High Strength & Purity
629: Resists Aggressive Plasmas
639: Enhanced Plasma Resistance
640: Excellent Fluorine & Oxygen Resistance
653: High Temperature, Carbon-Loaded Compound
655: High Temperature, White Compound
656: Low Metallic Ion Content
657: Minimal Particulation in Dry Etch
E38: Minimal Contamination in Dry Plasma
SubFab
XCD: Superior Thermal Resistance
XPE-HP: Provides Superior O2, Ozone, and UV
XPE: O2 Plasma Resistance
XRZ: Corrosion Resistance
XTR: Exceptional Performance in ClF3 Environments

Viton O型环
FKM 706: High Purity Fluoroelastomer
FKM 742: High-Performance Fluoroelastomer

FPD制程中污染最小
FPD Blue™ 707: Minimal Contamination in FPD Processing