英特格 气体输送柜系统

英特格(Entegris)的高纯度气柜系统的设计主旨是在低压下输送各种制程的有毒气体，消除灾难性气体释放的风险并确保更安全的工作环境。

• PDS® Delivery System
  A high-purity, auto-switchover gas distribution system. The PDS Delivery System supplies a continuous flow of process gas, even when the online source cylinder empties.


• TX-4™ Gas Delivery System
  The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.