英特格 特种气体混合物

成为制程气体的专家的Entegris，使用单一包装的混合气体减少了从多个钢瓶中同时流出，并一直致力于提高气体应用的效率，安全性和性能。 以定制比例创作气体混合物是英特格(Entegris)能够支持您的需求的另一种方式。

• Enriched 72GeF4 + H2 Mixture
  Enriched 72GeF4 + H2 Mixture is one of the premium gas blends Entegris offers in a single package, reducing the need to co-flow species from multiple cylinders.


• Enriched BF3 + H2 Mixture
  Entegris offers gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool.


• CO Tri Mixture
  Entegris offers premium gas blends in a single package reducing the need to co-flow species from multiple cylinders.