英特格 成品晶圆运输盒

当元件制造商提升其制造制程时,英特格(Entegris)所提供完整系列的成品晶圆运送，将能改善良率以及增生产力。

• SmartStack® Horizontal Wafer Shippers
  The SmartStack® Horizontal Wafer Shipper provides the necessary protection against ionic, outgassing and mechanical elements to maintain wafer integrity during transport, storage or shipping.


• Film Frame Rings and Shippers
  Our multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers or singulated die mounted to film frames. Ideal for shipping "diced" or thinned GaAs or GaP wafers as well as storing or shipping wafers mounted to a film frame. Shippers are available for 300 mm, 200 mm and 150 mm film frame applications.