英特格 光阻涂布帮浦

英特格(Entegris)最先进2-stage供给技术可独立过滤并免除内置Impact®8G过滤器支架。 适用于低，中，高粘度流体。

• IntelliGen® LV Dispense Systems
  New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of low viscosity fluids.


• IntelliGen® HV Dispense Systems
  Two-stage system with built in dual PT sensors enables independent dispense and filtration of high-viscosity fluids


• IntelliGen® MV Dispense Systems
  New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of medium-viscosity fluids.


• IntelliGen® ULV Dispense Systems
  Leading-edge, two-stage system with built in dual PT sensors not only enables independent dispense and filtration, but also achieves defect reduction of low-viscosity fluids.


• IntelliGen® Mini Dispense Systems
  Two-stage system with built in single PT sensor enables independent dispense and filtration of low-viscosity fluids.