英特格 AMC过滤器

英特格(Entegris)提供空气分子污染(AMC)控制的过滤器，来控制无尘室空气中的悬浮微粒化学污染物，并保护制程设备和晶圆免受AMC的破坏。

• Stepper and Scanner Filters
  Entegris’ stepper and scanner filters are designed to provide reliable protection from airborne molecular contamination sources. Use Entegris filters confidently in a variety of work areas and tool makers.


• Process Tool Air Filters
  Entegris tool AMC filters provide superior protection from common AMC in the fab including molecular acids, bases and organics. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements.


• Cleanroom Filtration
  Superior protection for advanced semiconductor manufacturing environments at sub-65 nm modes. Field- and lab-proven for use in semiconductor manufacturing environments, including lithography, etch, CPM, metrology and reticle storage areas.


• Filter Housing for DUV, EUV Scanners
  Chemically purify environmental air used in photolithography exposure tools. These filters housing protect exposure tools from a full range of airborne molecular contaminants.