英特格 气体纯化系统

英特格(Entegris)独立气体纯化系统采用先进的控制技术提供原位再生，自动再生气体纯化系统可将污染物去除至 PPT 等级。 另外还提供安全性，环保系统等配置供选择，以满足特定应用需求。

• GateKeeper® Gas Purification Systems
  GateKeeper® Gas Purification Systems effectively remove gaseous contaminants down to part-per-trillion levels with inorganic media. You can trust our cost-effective GateKeeper® systems to help you avoid contamination of your process without damaging tools.


• Aeronex® Gas Purification Systems
  Aeronex® gas purification systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regeneration or to install a replacement purifier.