英特格 液体过滤器

Entegris 有领先业界的化学品，水，溶剂和光化学的污染控制技术. 可以控制制程中的污染物以改善运作的效能以及促进技术的进步。英特格(Entegris)提供各种薄膜和介质是在每一个制造环境下，满足各种化学相容性以及制程条件。

• FlowPlane™ Linear Filtration Technology
  Best-in-class linear filtration technology.


• Torrento® X Filter
  Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries.


• Torrento® S Filter
  Best-in-class, leading-edge filtration of solvents and BEOL chemistries.


• QuickChange® NX Filter
  Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries.


• Fluorogard® NX Filter
  Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications.


• Guardian™ ECD Filter
  Advanced, ultra-clean filtration of low-temperature, dilute acids and bases.


• Intercept® HP/HS Filters
  Best in class, low-temperature dilute acid filter.


• Impact® 8G Filter
  Best-in-class, ultra-clean, point-of-use photochemical filter, delivering superior flow rate performance and reduced microbubble formation capabilities.


• Microgard™ UC Filter
  Best-in-class, ultra-clean, bulk photochemical filter.


• Eximor® SV5 Filter
  Advanced clean, point-of-use filter designed for NTD and RRC solvents.