英特格 液体纯化器

在关键制程液流中,控管金属离子和其他污染物,是改善运作效率和促进技术进步的最佳方案。英特格(Entegris)可提供PTFE，PS和UPE膜以及离子交换介质，每种净化器都设计成可减少来自金属离子和其他污染物所引起的缺陷。

• Purasol™ SP/SN Solvent Purifiers
  Ultraclean solvent purification with total metal removal performance.


• Protego® Plus IPA Purifier
  High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications.


• Protego® Plus HT Purifier
  All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80°C).


• Protego® Plus LT Purifier
  All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at low temperatures (less than 60°C).