英特格 光罩组件

光罩组件的设计可提供光罩坚固的保护以及精确的自动化界面，提高产量并使突发性停机状况大幅降低. 英特格(Entegris)所提供的一系列光罩套件，主要是为用户提供低成本高效益之设计，并结合防污染之极高等级的优势。
EUV pod光罩传送盒与生产设备的连接比如测量工具，扫描仪和储料器等是符合SEMI®标准E152。英特格2018开发出的EUV 1010 光罩盒已率先成为全世界第一个获得ASML认证，可用于NXE:3400B及未来更先进机台的光罩盒产品。

• H91 Series Mask Packages
  Entegris’ mask packaging, H91 series, are ideal for masks or reticles with pellicles.


• H60 Series Mask Packages
  Entegris’ line of mask packages, H60 series, hold one mask or reticle and are manufactured and packaged in a cleanroom environment.


• H92 Series Mask Packages
  High impact resistance H92 Series mask packages provide excellent security for masks or reticles with pellicles.


• B80 Series Mask Packages
  Entegris’ B80 series of mask packages provide excellent security for masks and reticles with pellicles.


• Single Mask Pack 625
  Entegris’ single mask packages 625 provide excellent security for masks and reticles with pellicles.


• H68 Series Mask Packages
  Entegris’ mask packaging H68 series are ideal for masks or reticles with pellicles.