英特格 极紫外光（EUV）光罩传送盒

英特格(Entegris)的双吊舱设计提供了内部和外部吊舱，可维持无污染的环境，应用于极紫外光(EUV)微影技术的晶片大量生产，以保护制造过程中光罩的完整。

• 1008 Series EUV Pods
  Extreme ultraviolet light (EUV) reticle pod is designed to provide defect-free protection of EUV reticles during storage, handling and vacuum-transfer operations.