英特格 光罩传送盒

先进的光罩处理系统在存储和运送中可以保护好您价值不菲的光罩 英特格(Entegris)提供了一系列光罩传送盒Reticle SMIF Pod，其设计是在保护，存储和运输时能有效地保护有价值的微影光罩。 Entegris光罩盒提供了具备低成本高效益和极高程度的污染防护的设计优点。

• 150 mm Single Reticle Pods
  The 150 mm single reticle pod is an advanced reticle handling system providing superior performance during storage and transport.


• Multiple Reticle Pods
  Reticle SMIF pods designed to protect, store and transport valuable lithography reticles.


• 200 mm Reticle SMIF Pod
  Entegris’ RSP-200 reticle SMIF pod provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.


• 150 mm Reticle SMIF Pods
  The 150 mm reticle SMIF pod is an advanced reticle handling system providing superior performance during storage and transport.